Bis(methylcyclopentadienyl)(methyl)(methoxy)zirconium(IV)

双(甲基环戊二烯基)(甲基)(甲氧基)锆(IV)

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Strem

CAS

916597-01-8

货号

40-1028

包装型号

规格纯度

98+%

价格

1350 元 *本价格含增值税费

促销

数量

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916597-01-8
Bis(methylcyclopentadienyl)(methyl)(methoxy)zirconium(IV)
双(甲基环戊二烯基)(甲基)(甲氧基)锆(IV)

半岛bd体育手机客户端介绍：

Technical Notes:

1. Precursor for the atomic layer deposition of zirconium oxide using water or ozone as co -reactants.1-6

References:

1.J. Electrochem. Soc. 2010, 157 (10), G202-G210.

2.Thin Solid Films, 2010, 519 (2), 666-673.

3. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing,

Measurement, and Phenomena, 2009, 27, 389.

4.Chem. Mater., 2008, 20 (17), 5698-5705

5.Chemical vapor deposition, 2008, 14, 358-365

6. Journal of Materials Chemistry, 2008, 28, 3385-3390.

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