Technical Notes:
1. Volatile carbonyl precursor for the growth of cobalt films
References:
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2.Chem. Mater. 1991. 3. 13.
3.J. Electrochem. Soc.2001 148. C21.
4.chem. ommun. 2010, 46, 2748 .
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6.J. Vac. Sci. Technol. B 2017. 35, 031601.
7.J. Vac. Sci. Technol. A 2019 37.060906.
Strem