Technical Notes:
1. Liquid cobalt amidinate for ALD and CVD of cobalt metal and composite thin films .
References:
1.Dalton Trans., 2008, 2592 .
2.ECS J. Solid State Sci. Technol. 2012, 1, N79.
3.Chem. Mater. 2014, 26, 2642
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5.J. Mater. Chem. c, 2015, 3, 2500.
6.ECS J. Solid State Sci. Technol. 2017, 6, P345 .
7.J. Alloys Compd. 2018, 737, 684
8.J. Vac. Sci. Techol. A, 2019, 37, 010903.
Strem