銆€銆€SPM(鎵弿鎺㈤拡鏄惧井闀?涓嶴EM(鎵弿鐢靛瓙鏄惧井闀?鐩告瘮锛孲EM鍘嗗彶鏇撮暱涓斿湪鍚勬柟闈㈢殑鍙戝睍宸叉棩娓愭垚鐔熴€傝€孲PM姝ｅ鍦ㄦ柟鍏存湭鑹剧殑鍙戝睍涔嬩腑锛岃蒋浠?纭欢涓嶆柇寮€鍙戝崌绾э紝搴旂敤鎶€鏈篃鍦ㄤ笉鏂紑鎷撱€傛洿閲嶈鐨勬槸锛孲PM骞堕潪鏄湪婧SEM鐨勫彂灞曞巻鍙诧紝鑰屾槸鏈濈潃涓€涓喘鏂扮殑鏂瑰悜鍦ㄥ彂灞曘€傝櫧鐒朵粠鍚嶇О涓婄湅浜岃€呯被浼硷紝浣嗕粠鏈川鏉ヨ锛屸€滄壂鎻忔帰閽堚€濅笌鈥滄壂鎻忕數瀛愨€濇棦鏈夌被浼间箣澶勶紝鍙堟湁瀹屽叏涓嶅悓涔嬪銆侟/span>

銆€銆€鏈枃閫氳繃瑙傚療甯歌鐨勬槅铏鐪间负渚嬫潵姣旇緝涓ょ浠櫒锛屼粙缁峉EM鏃犳硶鑾峰緱鑰孲PM鍙互鑾峰緱鐨勯珮搴﹀垎鏋愮粨鏋溿€傝鏄嗚櫕澶嶇溂瑙傚療瀹炰緥锛屼篃閫傜敤浜庡叾浠栧悇绉嶆潗鏂欑殑瑙傚療銆佹祴瀹氥€侟/span>

1. SPM涓嶴EM鐨勫浘鍍忔瘮杈傸/span>

? SPM鍍忥紙鍥?锛堻/span>

鍥句负铓傝殎澶嶇溂鐨勪笁缁村浘鍍忋€傚湪鍑嗙‘娴嬪畾鍚勭偣楂樺害鍩虹涓婂舰鎴愮殑涓夌淮鍥惧儚锛岃兘澶熺湡瀹炵殑鍙嶆槧鍑哄鐪艰〃闈㈢殑鍑瑰嚫銆侟/span>

SPM瑙傚療涓嶅埌鏍峰搧鐨勯鑹诧紝閫氳繃妯℃嫙鑹插僵鏉ヨ〃绀恒€傚彲鏍规嵁鏍峰搧鐨勬儏鍐垫坊鍔犻鑹插苟鍖哄垎浣跨敤銆侟/span>

涓夌淮鍥惧儚涔熷彲浠ユ牴鎹珮搴﹀鐞嗙粨鏋滐紝娣诲姞鍏锋湁鐓ф槑鏁堟灉鐨勯槾褰辫繘琛屽悎鎴愭樉绀恒€侟/span>

涓嶴EM鍥惧儚鐩告瘮锛孲PM鍥惧儚淇濆瓨鍚庡彲浠ヨ嚜鐢卞啀澶勭悊锛屾洿閫傜敤浜庝簨鍚庤瘎浠枫€侟/span>

鍥?铓傝殎澶嶇溂鐨凷PM鍍忥紙鍚堟垚涓夌淮鍥惧儚锛堻/span>

? SEM鍍忥紙鍥?锛堻/span>

銆€銆€SEM鍍忕殑浼樺娍鍦ㄤ簬鍥惧儚鍏锋湁杈圭紭鏁堝簲銆係EM鍍忕殑瀵规瘮搴︼紝涓嶆槸鐢遍珮搴﹀紩璧风殑锛岃€屾槸鐢变簩娆＄數瀛愮殑浜х敓閲忓紩璧风殑锛屽叿鏈変簩缁翠俊鎭€傚洜姝わ紝铏界劧涓嶈兘璇诲彇璇ラ珮搴︼紝浣嗗彲浠ュ緢娓呮櫚鐨勮瀵熷埌澶嶇溂銆侟/span>

銆€銆€SEM鍍忥紝淇濆瓨鍚庣殑鍥惧儚澶勭悊鍙楅檺銆備緥濡傦紝鍊炬枩鏍峰搧鐨勫浘鍍忕瓑锛屽繀椤讳繚瀛樻瘡涓潯浠朵笅鐨勫浘鍍忋€侟/span>

銆€銆€涓嶴PM鐩告瘮锛孲EM鍦ㄥぇ瑙嗛噹鍙婂嚬鍑镐笉骞崇殑澶ф牱鍝佽瀵熶笂鍏锋湁涓€瀹氱殑浼樺娍銆侟/span>

鍥? 鑻嶈潎澶嶇溂鐨凷EM鍍廃/span>

2. 閫氳繃SPM杩涜鏂潰褰㈢姸瑙傚療涓庨珮搴﹀垎鏋忺/span>

銆€銆€鍒╃敤SPM鍍忔墍鍏锋湁鐨勪笁缁村浘鍍忎俊鎭垎鏋愬鐪肩殑褰㈢姸銆傚浘3涓哄嚬鍑稿儚锛?锛夛紝鍏跺浘鍍忎腑鐨勫垎鏋愮嚎A鈥擝鐨勬柇闈㈠舰鐘跺鍥?鎵€绀恒€傛柇闈㈠浘鐨勭旱鍚戝埢搴︽槸鎵╁ぇ3鍊嶆樉绀虹殑銆傜敱鍥惧彲鐭ワ紝澶嶇溂鐨勯珮搴︿负2.91渭m锛堢孩绾胯〃绀猴級锛屽搴︿负16.0渭m锛堢豢绾胯〃绀猴級銆侟/span>

鍥? 鍑瑰嚫鍍忎笌鍒嗘瀽绾緼鈥擝	鍥?銆€ 鏂潰鍥句笌楂樺害鍒嗘瀽

銆€銆€鍑瑰嚫鍍忥紙锛婏級锛氬嵆Topography锛岄€氳繃鍥惧儚鍙充晶鐨勮壊鍒椾笌鐩存柟鏌辩姸鍥惧垎鏋愰珮搴﹀強鍏跺垎甯冩儏鍐点€侟/span>

3.澶嶇溂鐨勭矖绯欏害瑙ｆ瀽

銆€銆€SPM閫氳繃缁熻瀛︽柟娉曞垎鏋愬鐪肩殑绮楃硻搴︺€傚緢澶氫汉閮戒細涓轰簡娴嬪畾绮楃硻搴﹁€屼娇鐢⊿PM锛屼笌瑙﹂拡寮忕矖绯欏害璁＄浉姣旓紝涓嶄粎鑳芥祴閲忕嚎銆侀潰鐨勫井绫崇矖绯欏害锛屾洿绐佸嚭鐨勪紭鍔垮湪浜庤兘澶熷噯纭祴閲忕撼绫崇矖瓒呭害銆傞€氳繃瀵筍PM涓夌淮淇″彿鐨勮嚜鍔ㄨВ鏋愶紝涓€鑸儏鍐典笅甯哥敤鈥滃钩鍧囩矖绯欏害鈥濅笌鈥滄渶澶х矖绯欏害鈥濈瓑琛ㄧず锛屽鍥?鎵€绀恒€侟/span>

闀垮害X?Y : 娴嬪畾鑼冨洿 Ra : 绠楁湳骞冲潎绮楃硻搴?br/> Rz : 鏈€澶х矖绯欏害锛堥珮搴︼級 Rzjis : JIS鍗佺偣骞冲潎绮楃硻搴?br/> Rq : 鍑犱綍骞冲潎鍊肩矖绯欏害 Rp : 鏈€澶у嘲楂樺害 Rv : 鏈€澶ц胺娣卞害 鐢辨寰楀嚭 Rp+Rv=Rz	闀垮害X 40.000锕櫸糾锕欬br/> 闀垮害Y 40.000锕櫸糾锕欬br/> 闈㈢Н 1600.000锕櫸糾?锕欬br/> Ra 662.704锕檔m锕欬br/> Rz 4.403锕櫸糾锕欬br/> Rzjis 2.178锕櫸糾锕欬br/> Rq 795.501锕檔m锕欬br/> Rp 1.708锕櫸糾锕欬br/> Rv 2.695锕櫸糾锕欬/span>
娉細閫氬父涓嶄細瀵硅殏铓佸鐪艰繘琛岀矖绯欏害鍒嗘瀽銆侟/span>	鍥? 铓傝殎澶嶇溂鐨勭矖绯欏害鏁版嵁

4.閫氳繃SPM杩涜绮掑害鍒嗘瀽

銆€銆€SPM鐨勭矑搴﹀垎鏋愯蒋浠讹紝鍒╃敤楂樺害涓庨潰绉暟鎹粠涓夌淮鍥惧儚涓彁鍙栧浘鍍忚疆寤擄紝鍐嶄粠绾?0绉嶇壒寰侀噺涓€夋嫨闇€瑕佺殑鍙傛暟杩涜杩呴€熺殑缁熻澶勭悊銆傝繖浜涚壒寰侀噺鍙互琛ㄦ牸銆佺粺璁″浘褰㈠紡鏄剧ず銆傛湰鏂囦腑锛岄€夋嫨浜嗕互涓?涓壒寰侀噺杩涜瑙ｆ瀽銆侟br/> 鈶犲钩鍧囩洿寰 鈶鐨勬渶澶у€ 鈶㈣〃闈㈢Н 鈶ｄ綋绉?/span>

鍥? 绮掑害鍒嗘瀽杞欢鎻愬彇鍥惧儚

銆€銆€鍥?鍦ㄦ彁鍙栧浘鍍忚疆寤撴椂锛屽叡鎻愬嚭14涓矑瀛愶紝杞欢鑷姩鍒犻櫎浜嗕笉瀹屾暣鐨勭矑瀛愶紝濡傚浘淇濈暀浜?涓畬鏁寸矑瀛愶紙1锝?锛夈€侟/span>

銆€銆€璇ヨ蒋浠跺彲浠ュ悓鏃堕珮閫熻В鏋?000涓互涓婄殑绮掑瓙锛屽洜姝ゅ彲浠ュ绾崇背绮掑瓙杩涜瑙ｆ瀽銆侟/span>

銆€銆€鍥?涓?涓壒寰侀噺鐨勫垪琛紝鍏堕『搴忎笌鍥?鐨?锝?鐩稿搴斻€傜敱璇ョ粨鏋滃彲鐭?鍙风矑瀛愮殑骞冲潎鍗婂緞涓?.86渭m锛岀洿寰勭害涓?5.7渭m锛岄珮搴︿负2.95渭m銆傞珮搴︾害涓虹洿寰勭殑1/5锛屽洜姝わ紝绠椾笉涓婄溂鐫涘悜澶栫獊鍑恒€侟/span>

缂栧彿	骞冲潎鍗婂緞(渭m)	Z鐨勬渶澶у€?渭m)	琛ㄩ潰绉?渭m2)	浣撶Н(渭m3)
1	7.856	2.948	262.2	315.8
2	7.456	2.871	256.1	257.2
3	7.656	2.876	242.8	295.0
4	7.578	2.765	235.7	276.3

鍥? 绮掑害瑙ｆ瀽缁撴灉涓€瑙堣〃

銆€銆€SPM甯︽潵鐨勪笁缁翠笘鐣岋紝涓嶄粎鍙互瑙ｅ喅璁稿浜岀淮SEM涓嶈兘瑙ｅ喅鐨勯棶棰橈紝鑰屼笖鎵€寰楀浘鍍忓彲浠ヨ嚜鐢辩殑澶勭悊銆佹椿鐢紝缁欑爺绌惰€呭甫鏉ユ洿澶氱殑甯屾湜銆侟/span>