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鎬ц兘浼樺娍

鍏ㄨ嚜鍔ㄥ寲璁捐

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锠曞姩娉袋/span>

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姘斾綋娴侀噺鑷姩鎺у埗

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鍏堣繘鐨勮繘鏍风郴缁烖/span>

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鐙壒绮惧瘑鐨勫厜瀛︾郴缁烖/span>

閲囩敤涓樁姊厜鏍?妫遍暅浜ゅ弶鑹叉暎鏂瑰紡锛屼笓涓氱殑鍏夊浼樺寲璁捐浣垮緱鍏夐€氶噺鏈€澶у寲鐨勫悓鏃朵繚璇佷簡浼樺紓鐨勫厜璋卞垎杈ㄧ巼锛涙棤浠讳綍绉诲姩鍏夊鍏冧欢锛屼繚璇佷簡鑹ソ鐨勯暱鏈熺ǔ瀹氭€э紱瓒呬綆鏉傛暎鍏夎璁￠厤鍚堢嫭鐗圭殑鍏夊璁捐锛屽ぇ澶ч檷浣庝簡鑳屾櫙鍏夌殑骞叉壈锛岃繘涓€姝ユ彁楂樻鍑洪檺锛涢珮鏁堢殑姘皵鍒嗗竷寮忓惞鎵厜瀹ら厤鍚堥珮鍝佽川鐨勫厜瀛﹀厓浠朵繚璇佷簡娣辩传澶栧尯鐗瑰埆鏄疨銆丼銆丄s绛夊厓绱犵殑娴嬮噺銆侟/span>

绮惧噯鐨勬尝闀垮畾浣岦/span>

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鎬ц兘浼樺紓鐨勬帰娴嬪櫒

閲囩敤澶у昂瀵窩ID鎺㈡祴鍣紝鍏堣繘銆佹垚鐔熴€佺ǔ瀹氾紱澶ч澏闈㈠昂瀵革紝鐧句竾绾у儚绱狅紱165-900nm鑼冨洿杩炵画瑕嗙洊锛屼竴娆℃洕鍏夛紝鍏ㄨ氨鏄剧ず锛涢潪鐮村潖鎬ц鍙?NDRO) 鍔熻兘锛屾敼鍠勪簡寮卞垎鏋愮嚎鐨勪俊鍣瘮锛屾彁楂樹簡缁撴灉鐨勫噯纭€э紝骞朵笖鏁版嵁閲囬泦涓庡垎鏋愬潎浼樹簬CCD锛 鏋佷匠鐨勭嚎鎬у姩鎬佽寖鍥村拰涓庣敓淇辨潵鐨勬姉婧㈠嚭鍔熻兘纭繚浠绘剰寮哄急鐨勮氨绾垮彲鍦ㄤ竴娆℃洕鍏夊唴娴嬮噺骞惰繘琛屽垎鏋愶紝鍚屾椂涓烘柟娉曢€夋嫨鐞嗘兂娉㈤暱鎻愪緵浜嗙伒娲绘€?鍙€夌浜屻€佺涓夋垨鏇存鐏垫晱绾挎潵鎺掗櫎骞叉壈)銆侟/span>

瓒呭揩鐨勬祴璇曢€熷害

鍚勫垎鏋愯氨绾垮彲浠ュ湪鏇濆厜鏃堕棿鍐呰缃换鎰忓悎閫傜殑绉垎鏃舵鏉ュ疄鐜版祴閲忕殑鏈€浼樺寲锛涘彲浠ヤ竴娆℃洕鍏夎鍑烘墍鏈夊垎鏋愯氨绾跨殑寮哄害绉垎鍊煎姞蹇垎鏋愰€熷害锛涜繕鍙互鎸囧畾璋辩嚎鐙珛璇诲嚭锛岃鍑烘椂闂翠笉瓒呰繃2ms銆侟/span>

寮哄ぇ鐨勮蒋浠跺垎鏋愬姛鑳键/span>

杞欢鎿嶄綔鏂逛究銆佺洿瑙傦紝鍏锋湁瀹氭€с€佸崐瀹氶噺銆佸畾閲忓垎鏋愬姛鑳斤紝鍏锋湁浠櫒璇婃柇浼樺寲鍔熻兘锛岀伒娲荤殑鍏ㄨ氨鐮旂┒鍔熻兘锛屽己澶х殑绂荤嚎鍐嶅鐞嗗姛鑳斤紝鍏锋湁绉戝鏅鸿兘鐨勮儗鏅牎姝ｃ€佸幓闄ゅ共鎵扮殑绠楁硶鍔熻兘锛岃娴嬭瘯鍙樺緱鏇村姞涓撲笟涓庡噯纭€侟/span>

鎶€鏈弬鏁?/span>

灏勯鍙戠敓鍣ㄦ妧鏈寚鏍嘃/span>

杈撳叆鐢垫簮锛氫氦娴?20V锛岀數娴?0A

杈撳嚭鍔熺巼锛?00锝?600W

璋冭妭绮惧害锛?W

棰戠巼绋冲畾鎬э細锛?.05%

杈撳嚭鍔熺巼绋冲畾鎬э細锛?.1%

鍖归厤鏂瑰紡锛氳嚜鍔ㄥ尮閰岦/span>

鐢电鍦烘硠婕忚緪灏勫己搴︼細璺濇満绠?0cm澶勭數鍦哄己搴锛氾紲0.5V/m

杩涙牱瑁呯疆鎶€鏈寚鏍嘃/span>

杈撳嚭宸ヤ綔绾垮湀锛氬唴寰?5mm銆?鍖滭/span>

涓夊悓蹇冪煶鑻辩偓绠★細澶栧緞20mm锛涙牴鎹腑蹇冮€氶亾澶у皬鏈夊绉嶅瀷鍙峰彲閫堻/span>

楂樻晥杩涘彛闆惧寲鍣細鍚屽績鍨嬮浘鍖栧櫒锛屽寰?mm 锛涘鍨嬪彿鍙€夛紝楂樼洂銆佽€怘F绛堻/span>

闆惧寲瀹わ細鍙岀瓛鍨嬮浘鍖栧锛屽彲浠ラ€夐厤鏃嬫祦寮忛浘鍖栧锛屽寰?7.2mm

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鎬绘癌姘旀秷鑰楅噺锛氭癌姘旀€绘秷鑰楅噺灏忎簬14L/min

姘╂皵娴侀噺璁″拰杞芥皵鍘嬪姏琛ㄨ鏍硷細1.绛夌瀛愭皵娴侀噺璁?100锝?000)L/h (1.6锝?6L/min)

2.杈呭姪姘旀祦閲忚(6锝?0)L/h (0.1锝?L/min)

3.杞芥皵娴侀噺璁?6锝?0)L/h (0.1锝?L/min)

4.杞芥皵绋冲帇闃€(0.2MPa)

5.鍐峰嵈姘达細姘存俯20锝?5鈩 娴侀噺>5L/min 姘村帇>0.1MPa

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鍏夋爡锛氫腑闃舵鍏夋爡锛?2.67 lp/mm锛?4闂€€瑙掞紝閲囩敤寰峰浗鑲栫壒鍏徃鐑啫鑳€绯绘暟鎺ヨ繎浜庨浂鐨凕/span>

Zerodur鏉愭枡鍋氬熀搴曪紝鎬ц兘鏇村嚭浼桙/span>

妫遍暅锛氳秴绾悍瀹佺传澶栫啍铻嶇煶鑻憋紝鍦?70nm澶勫唴閫忚繃鐜?9.6%

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鐒﹁窛锛?30mm

鏁板€煎瓟寰勶細F/8锛岃秴楂樼殑鍏夐€氶噺淇濊瘉浠櫒鐨勬鍑洪檺鍜岀伒鏁忓害

鍒嗚鲸鐜囷細<0.0068nm@200nm

鏉傛暎鍏夛細10000ppmCa 婧舵恫鍦ˋs189.042nm澶勭殑绛夋晥鑳屾櫙娴撳害<2ppm

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鍒嗗竷寮忔爱姘斿惞鎵紝姝ｅ父鍚规壂2L/min锛屽揩閫熷惞鎵?L/min

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妫€娴嬪櫒绫诲瀷锛氱數鑽锋敞鍏ュ紡妫€娴嬪櫒(CID)

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璇诲彇鏂瑰紡锛氶潪鐮村潖鎬ц鍙?NDRO) 锛屽叏骞呰鍙?FF)鍜屼换鎰忚鍙栫Н鍒?RAI)

绾挎€у姩鎬佽寖鍥达細108

娉㈤暱鍝嶅簲鑼冨洿锛?65nm锝?000nm

鐢靛瓙蹇棬锛氬崟鐙缃悇璋辩嚎鐨勭Н鍒嗘椂闂达紱鍙寚瀹氳氨绾跨嫭绔嬭鍑猴紝璇诲嚭鏃堕棿锛?ms

閲忓瓙鏁堢巼锛氭棤浠讳綍闀€鑶滐紝200nm绱鍖哄彲杈?5%浠ヤ笂

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浠櫒鎶€鏈寚鏍嘃/span>

瑙傛祴鏂瑰紡锛氬瀭鐩磋娴婞/span>

娑蹭綋鍚噺锛?.01ppm锝炲嚑鍗僷pm

鍥轰綋鍚噺锛?.001%锝?0%

閲嶅鎬э細(鍗崇煭鏈熺ǔ瀹氬害)鐩稿鏍囧噯鍋忓樊RSD<0.5%

绋冲畾鎬э細鐩稿鏍囧噯鍋忓樊RSD<1% @2灏忔椂

娴嬭瘯閫熷害锛氬崟涓氨绾緾ID璇诲嚭鏃堕棿浠呴渶2ms锛屼竴鍒嗛挓鍐呭彲瀹炵幇鎵€鏈夊厓绱犵殑娴嬮噺

鍏冪礌妫€鍑洪檺(渭g/L)锛氬ぇ閮ㄥ垎鍏冪礌1ppb锝?0ppb

浠櫒灏哄锛氬彴寮?300mm*840mm*740mm

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1.纭呭伐涓氾細纾佹€ф潗鏂欏姞宸ヨ涓欬/span>

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3.姘磋川鍒嗘瀽锛氬彲妫€娴嬫按璐ㄦ薄鏌撶殑鍏ぇ閲嶉噾灞炵瓑鍏冪礌

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5.鐭虫补鍖栧伐鍜岃交宸ラ鍩熺殑搴旂敤锛氭祴璇曞師娌逛腑鐨?0澶氱鍏冪礌锛屼富瑕佹湁Fe銆丯a銆丮g銆丯i銆乂銆丆a銆丳b銆丮o銆丮n銆丆r銆丆o銆丅a銆丄s绛堻/span>

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