X-灏勭嚎鍏夌數瀛愯兘璋 锛圶PS锛孹-ray Photoelectron Spectroscopy锛夛紝涔熷彨ESCA锛 Electron Spectroscopy for Chemical Analysis锛夛紝鏄爺绌惰〃闈㈡垚鍒嗙殑閲嶈鎵嬫銆?960鈥檚 鐢盪niversity of Uppsala, Sweden 鐨凨ai Siegbahn绛夊彂灞曪紝閴翠簬K. Siegbahn鏁欐巿瀵瑰彂灞昘PS棰嗗煙鍋氬嚭鐨勯噸澶ц础鐚紝浠栬鎺堜簣1981骞磋璐濆皵鐗╃悊瀛﹀銆侟br/> XPS鏄竴绉嶅熀浜庡厜鐢垫晥搴旂殑鐢靛瓙鑳借氨锛屽畠鏄埄鐢╔灏勭嚎鍏夊瓙婵€鍙戝嚭鐗╄川琛ㄩ潰鍘熷瓙鐨勫唴灞傜數瀛愶紝閫氳繃瀵硅繖浜涚數瀛愯繘琛岃兘閲忓垎鏋愯€岃幏寰楃殑涓€绉嶈兘璋便€俋PS涓嶄粎鑳芥帰娴嬭〃闈㈢殑鍖栧缁勬垚锛岃€屼笖鍙互纭畾鍚勫厓绱犵殑鍖栧鐘舵€侊紝鍥犳锛屽湪鍖栧銆佹潗鏂欑瀛﹀強琛ㄩ潰绉戝涓緱浠ュ箍娉涘湴搴旂敤銆侟/span>

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2銆佺數瀛愯兘閲忓垎鏋愬櫒锛氬搴斾笂杩拌兘閲忕殑鍒嗘瀽鍣紝鍙彲鑳芥槸琛ㄩ潰鍒嗘瀽锛汓br/> 3銆侀珮鐪熺┖绯荤粺锛氳秴楂樼湡绌鸿厰瀹uper-high vacuum chamberUHV閬垮厤鍏夌數瀛愪笌姘斾綋鍒嗗瓙纰版挒鐨勫共鎵帮級銆侟/span>

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