路鍏夊埢鑳舵秱灞備笉鍙楀奖鍝岦/div>
*铓€鍒婚€熺巼鏍规嵁姘у寲纭呰啘缁撴瀯鑰屾敼鍙楛/div>
缂撳啿鍓傦紞HF鐨勪娇鐢?/span>
缂撳啿鍓傦紞
HF鑳芥繁瑙e湪纭呰〃闈笂鍒跺嚭鐨勫苟鍦ㄥ厜鍗板埛鏈腑鏆村厜鐨勪簩姘у寲纭呰啘锛堢儹鐢熼暱鍜岀鐑稴iO2锛夈€傚畠杩樿兘婧惰В鍗婂浣撳姞宸ヨ繃绋嬪舰鎴愮殑纾蜂簩姘у寲纭呭拰纭间簩姘у寲纭呯幓鐠冧腑鐨勬幒鏉備簩姘у寲纭呰啘锛屾€诲寲瀛﹀弽搴斿紡涓猴細4HF+SiO2鈫 SiF4+2H2O 寤鸿鍦ㄥ埗浣滃崐瀵间綋骞抽潰鍜屽彴闈㈠瀷浜屾瀬绠¤缃殑鏂版妧鏈腑浣跨敤缂撳啿鍓傦紞HF锛屾搷浣滃畨鍏ㄦ棤璇紝瀹冧笌闃达紝闃虫€у厜鍒昏兌閮界浉鍖归厤銆傛槗浜庡緱鍒伴噸鐜版€ц壇濂界殑缁撴灉锛屼笉浼氬嚭鐜拌竟涓嬭殌琚帺钄界殑姘у寲鐗┿€佽〃闈㈢潃鑹插拰閲嶉噾灞為€犳垚璐ㄩ噺闄嶇骇绛夌幇璞°€侟/span>
鎸囧鎰忚
澶у鏁板疄闄呮哀鍖栫墿閽濆寲灞傚帤搴﹁寖鍥存槸
2000?鍒?span >5000
?锛屽皢鍏跺湪瀹ゆ俯涓嬩簬缂撳啿鍓傦紞
HF娑蹭腑娴告场2-5鍒嗛挓閮戒細寰楀埌鑹ソ鐨勭粨鏋滐紝蹇呰鏃舵帴瑙︽椂闂村彲閫傚綋澧炲噺銆傛搷浣滃畬姣曪紝搴斿綋鐢ㄥ幓绂诲瓙姘村皢缂撳啿鍓?HF鍐叉礂鎺夈€傜紦鍐插墏-HF鐨勭紦鍐叉寚鏁伴珮锛屽洜姝ゅ湪鍥哄畾鎺ヨЕ鏃堕棿鏉′欢涓嬪弽澶嶄娇鐢ㄣ€備负浜嗗蹇殌鍒婚€熺巼锛堢害2X锛夛紝鍙互鍦?5鈩冪殑娓╁害浣跨敤缂撳啿鍓?HF銆侟/span>
浜屾哀鍖栫鍘氬害涓庡弽灏勯鑹茬殑鍏崇郴
棰滆壊
|
|
鍘氬害
|
?
X 103
|
|
|
鐏拌壊銆侀粍瑜愯壊銆佽鑹秉/div>
|
0.1
|
0.3
|
0.5
|
--
|
--
|
钃濊壊
|
0.8
|
1.5
|
3.0
|
4.9
|
6.9
|
绱壊
|
1.0
|
2.7
|
4.7
|
6.5
|
--
|
缁胯壊
|
1.9
|
3.3
|
5.2
|
7.2
|
--
|
榛勮壊
|
2.1
|
3.7
|
5.6
|
7.5
|
--
|
姗欒壊
|
2.2
|
4.0
|
6.0
|
--
|
--
|
绾㈣壊
|
2.5
|
4.4
|
6.3
|
--
|
--
|
BD
铓€鍒诲墏
锛堢敤浜嶞span >PSG-SiO2浣撶郴锛堻/span>
鏈搧鏄姞缂撳啿鍓傛敼杩涚殑铓€鍒诲墏锛岀敤浜庤殌鍒荤7纭呯幓鐠冿紞
SiO2(PSG)鍜岀〖纭呯幓鐠僑iO2(BSG)浣撶郴銆侀挐鍖栨櫠浣撶琛ㄩ潰銆侭D铓€鍒诲墏PSG/SiO2姣旂巼浣庯紝鍙妸PSG閽濆寲鑶滀笅铓€鐜拌薄闄嶅埌鏈€浣庛€侟/span>
BD
铓€鍒诲墏鐨勮殌鍒荤壒鐐更/strong>
|
20鈩傸/div>
|
25鈩傸/div>
|
30鈩傸/div>
|
浠嬬數璐ㄦ潗鏂橖/div>
|
?/绉扅/div>
|
?/绉扅/div>
|
?/绉扅/div>
|
鐑敓闀军span >
SiO
2
|
0.87
|
1.22
|
1.72
|
PSG (6鎽╁皵
% P2O5)
|
1.85
|
2.47
|
3.35
|
铓€鍒绘瘮鐜嘃span >
(PSG/SiO
2)
|
2.12
|
2.02
|
1.95
|
娉細铓€鍒绘瘮鐜囧€奸殢PSG鍜孊SG鐨勭粍鎴愯€屾敼鍙樸€侟/span>
搴旂敤
鐢ㄤ綔娴告场鍨嬭殌鍒诲墏浠庢帴瑙︾墖涓婂幓闄|span >SiO2鑰屼笉浼ゆ崯PSG鑶溿€傚湪纭呮櫠浣撶鏅剁墖鎺ヨЕ瀛旈噾灞炲寲涔嬪墠锛岄鍏堜娇鐢ㄨ殌鍒诲墏锛岃€屽悗鐢ㄦ按鍜屼箼閱囧啿娲椾箣銆侟/span>
浜屾哀鍖栫铓€鍒诲墏
(娌夌НSiO2鐨勯€夋嫨鎬ц殌鍒诲墏)
鏈搧涓烘敼鎬?span >HF缂撳啿娑诧紝涓撻棬鐢ㄤ簬铓€鍒诲崐瀵间綋寰數瀛愪骇鍝佷腑鐨勬矇绉簩姘у寲纭咃紙SiO2锛夈€侟/span>
鐗圭偣
路 涓撻棬铓€鍒荤鐑锋垨涔欏熀鍘熺閰搁叝宸ヨ壓杩囩▼娌夌Н鐨凕span >SiO2鑶淈/span>
路 浣跨敤鏂逛究
路 缁忔祹渚垮疁
路 铓€鍒昏繃绋嬪彲绮惧瘑鎺у埗锛屾帓闄や簡姘у寲鐗╀笅铓€鐜拌薄
路 涓庡厜鍒昏兌鍖归厤鎬ц壇濂键/div>
璇存槑
浜屾哀鍖栫鏄崐瀵间綋寰數瀛愪骇鍝佷腑娌夌Н
SiO2鑶滅殑鎷╀紭铓€鍒诲墏銆傛湰铓€鍒诲墏鏄惈鏈変簩姘熷寲鐗╃瀛愮殑缂撳啿鍓傘€傚叾涓璈F娲诲害閫氳繃姘熷寲鐗┿€佷簩姘熷寲鐗╁拰HF缂撳啿鍖栫墿闂寸殑鍙嶅簲骞宠 鍔犱互璋冭妭銆傞噸閲戝睘鏉傝川鍚噺涓ユ牸鎺у埗鍦?ppm浠ヤ笅锛屼互淇濊瘉浜у搧璐ㄩ噺銆傝繖绉嶈殌鍒诲墏涓庨槾銆侀槼鎬у厜鍒昏兌閮芥湁鑹ソ鐨勫尮閰嶆€с€侟/span>
浜屾哀鍖栫铓€鍒诲墏鐨勬€ц川
澶栬
|
婢勬竻娑蹭綋
|
姣旈噸
|
1.1
|
pH
|
5.0
|
閲嶉噾灞濣/div>
|
< 1 ppm
|
铓€鍒婚€熺巼锛孅span >25 掳C
|
40 ?/绉扅/div>
|
缂撳啿鍓傝殌鍒昏兘鍔汓/div>
|
20 mgs. SiO
2/mL.
|
鎿嶄綔娓╁害
|
25鈩傸/div>
|
鍖归厤鍏夊埢鑳迭/div>
|
闃存€у拰闃虫€у厜鍒昏兌
|
璐瓨
|
瀹ゆ俯
|
澶栬
|
婢勬竻娑蹭綋
|
搴旂敤
浜屾哀鍖栫铓€鍒诲墏鐢ㄤ簬鍏夊埢鏈埗浣滃崐瀵间綋瑁呯疆鍜岄泦鎴愮數璺€傛矇绉?span >SiO
2鍦ㄦ鍒朵綔杩囩▼涓捣閽濆寲浠嬬數璐ㄦ垨涓庢爱鍖栫涓€璧疯殌鍒诲厜鎺╄啘鐨勪綔鐢ㄣ€係iO
2娌夌Н灞傜殑鍏稿瀷鍘氬害鏄?000
?鏁伴噺绾с€傜敤浜庤殌鍒荤儹鐢熼暱
SiO2鐨勬櫘閫氱紦鍐睭F婧舵恫涓嶈兘鐢ㄤ簬铓€鍒绘矇绉疭iO2鑶溿€傛矇绉疭iO2鑶滄槸纭呯兎缁忔哀鍖栨垨涔欏熀鍘熺閰搁叝缁忕儹瑙h€屼骇鐢熺殑銆傚拰鐑敓闀縎iO2鐩告瘮杈冿紝娌夌Н浜屾哀鍖栫鑶滆殌鍒绘椂閫熷害瑕佸揩銆傜敤浜屾哀鍖栫铓€鍒诲墏铓€鍒绘矇绉疭iO2鑶滈€熺巼鏄撲簬鎺у埗銆侟/span>
鐢ㄤ簩姘у寲纭呰殌鍒诲墏铓€鍒绘矇绉?span >SiO2鑶滄椂鐨勯€熺巼鎺у埗
铓€鍒绘椂闂滁/span>
锛堢锛堻/div>
|
SiO2
娌夌Н灞傚帤搴?/span>
( ? )
|
鍙嶅皠鐨勯鑹秉/span>
|
0
|
2150
|
姗欓粍
|
3
|
2100
|
榛凕/div>
|
6
|
1900
|
缁军/div>
|
9
|
1700
|
缁匡紞钃滭/div>
|
12
|
1500
|
钃滭/div>
|
15
|
1250
|
钃濓紞绱?/div>
|
20
|
1000
|
绱?/div>
|
25
|
900
|
绱紞钃滭/div>
|
30
|
800
|
瑜忺/div>
|
35
|
500
|
妫曢粍
|
40
|
300
|
鐏?/div>
|
45
|
100
|
鐏帮紞鏄庝寒
|
50
|
0
|
鏄庝寒
|
TIMETCH
铓€鍒诲墏
锛堜簩姘у寲纭呰啘鐨勬帶鍒惰殌鍒诲墏锛堻/strong>
TIMETCH铓€鍒诲墏鏄竴绉嶇壒鍒剁殑铓€鍒诲墏锛屽畠鐨勭壒鐐规槸鍦ㄨ殌鍒讳簩姘у寲纭呮椂锛岃殌鍒昏繃绋嬭兘寰楀埌寰堝ソ鎺у埗锛岃€屼笖娌℃湁杈逛笅铓€鐜拌薄銆侟span >Timetch 铓€鍒诲墏涓庨槾鎬у拰闃虫€у厜鍒昏兌閮界浉鍖归厤銆侟/span>
TIMETCH铓€鍒诲墏鐢ㄤ簬鍘婚櫎浜屾哀鍖栫鍜屾帶鍒迭span >MOS瑁呯疆姘у寲鐗╄啘鍘氬害銆傛铓€鍒诲墏杩樺缓璁敤浜庝簩鏋佺鍜屾櫠浣撶闀€閲戝睘鑶滃墠琛ㄩ潰姘у寲鐗╃殑鍘婚櫎銆侟/span>
瀵逛簬娌夌Н姘у寲鐗╋紝鍦ㄥ娓╀笅鐨勫幓闄ら€熺巼鏄?span >1.5?/绉掋€傝€屽浜庣儹鐢熼暱姘у寲鐗╂潵璇达紝姝ら€熺巼鍒欑◢寰樉寰楁參浜涖€傝殌鍒昏繃鍚庡簲褰撴帴鐫€鐢ㄨ捀棣忔按鎴栧幓绂诲瓙姘村啿娲椾箣銆侟/div>
鎬ц川
澶栬
|
婢勬竻婧舵恫
|
pH
|
5.5
|
鎿嶄綔娓╁害
|
25鈩傸/div>
|
闂偣
|
涓嶅彲鐕傸/div>
|
婧惰В鎬?/div>
|
涓庢按鐩告贩婧迭/div>
|
铓€鍒婚€熺巼
|
1.5 ?/绉掞紱
90?/鍒咟/div>
|
鏈夋晥鏈烖/div>
|
1 骞滁/div>
|
璐瓨
|
瀹ゆ俯
|
Timetch 铓€鍒诲墏涓庨摐鍖归厤銆侟/div>
SILOX VAPOX III
铓€鍒诲墏
鈪燑span >. 杩欎竴铓€鍒诲墏鐢ㄦ潵铓€鍒荤琛ㄩ潰涓婄殑娌夌Н姘у寲鐗┿€傝繖浜涙哀鍖栫墿鐢熼暱浜嶭PCVD瑁呯疆銆傚畠浠拰鐑敓闀挎哀鍖栫墿鍦ㄥ緢澶氶噸瑕佹柟闈㈡瀬涓嶇浉鍚屻€備竴鏂归潰鏄畠浠殑铓€鍒婚€熷害锛屽彟涓€鏂归潰鏄畠浠殑宸ヨ壓绋嬪簭銆傛矇绉哀鍖栫墿缁忓父鍦ㄩ晙閲戝睘鐨勭鍩烘澘涓婄敤浣滀竴涓挐鍖栧眰銆係ilox Vapox III铓€鍒诲墏璁捐鐢ㄦ潵铓€鍒婚晙閾濈鏉夸笂浣滀负閽濆寲灞傜殑娌夌Н姘у寲鐗╋紝鏁堟灉**銆傝繖绉嶈殌鍒诲墏娑蹭腑楗卞惈鐫€閾濓紝浠庤€屽皢鍏跺闀€閲戠殑鍩烘澘鐨勬蹈铓€鎬ч檷鍒版渶浣庨檺搴︺€侟/span>
鈪狘span >.
娌夌Н姘у寲鐗╋紙
Silox Vapox锛夌殑铓€鍒婚€熺巼锛?000?/鍒嗭紝
22 掳C锛孅/span>
鈪↑span >. 杩欎竴浜у搧涓惈鏈夛細
姘熷寲閾袋/div>
鍐伴唻閰伏/div>
閾濊厫铓€鎶戝埗鍓侟/div>
琛ㄩ潰娲绘€у墏
DI姘滁/td>