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娉㈤暱锛?10nm卤2nm

鎶戝埗鐜囨祴閲忚寖鍥达細0锝?00%

闆剁偣閫忓厜鐜囨紓绉伙細鈮?.5%/3min

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閫忓皠姣斿噯纭害锛毬?.5%

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鍚勯€氶亾璇樊锛?.5%

妫€娴嬫椂闂达細1min

澶栧舰灏哄锛?60脳240脳110(mm)