| Parameter |
Icon AFM Scanner |
FastScan AFM Scanner |
X-Y scan range
X-Y方向扫描范围 |
90?m x 90?m typical, 85?m minimum
90?m × 90?m 典型值，最小85?m |
35μm x 35μm typical, 30μm minimum
35?m × 35?m 典型值，最小30?m |
Z range
Z方向扫描范围 |
10?m typical in imaging and force curve modes,
9.5?m minimum
在成像及力曲线模式下典型值为10μm；最小9.5μm |
≥3μm |
Vertical noise floor
垂直方向噪音基底 |
<30pm RMS in appropriate environment typical
imaging BW (up to 625Hz)
<30pmRMS, 在合适的环境及典型的成像带宽(达到625Hz) |
< 40pm RMS, sensor in appropriate
environment (up to 625Hz)
< 40pmRMS, 在合适的环境(达到625Hz) |
X-Y tip-velocity max.
(1% tracking error) |
|
>2mm/Sec |
| Z tip-velocity max. |
|
12mm/Sec |
X-Y position noise
(closed-loop)
X-Y定位噪音(闭环) |
≤0.15nm RMS typical imaging BW (up to 625Hz)
≤0.15nm RMS，典型成像带宽(达到625Hz) |
≤0.20nm RMS typical imaging BW
(up to 2.5kHz in Adaptive)
≤0.20nm RMS，典型成像带宽(达到625Hz) |
X-Y position noise
(open-loop)
X-Y定位噪音(开环) |
≤0.10nm RMS typical imaging BW (up to 625Hz)
≤0.10nm RMS，典型成像带宽(达到625Hz) |
|
Z sensor noise level
(closed-loop)
Z传感器噪音水平(闭环) |
35pm RMS typical imaging BW (up to 625Hz);
50pm RMS, force curve BW (0.1Hz to 5kHz)
35pm RMS，典型成像带宽(达到625Hz);
50pm RMS，力曲线成像带宽(0.1Hz to 5kHz) |
30pm RMS typical imaging BW (up to 625Hz)
30pm RMS，典型成像带宽(达到625Hz) |
Integral nonlinearity(X-Y-Z)
整体线性误差(X-Y-Z) |
<0.5% typical
<0.5% 典型值 |
≤0.5% typical
≤0.5% 典型值 |
Sample size/holder
样品尺寸/夹具 |
210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick
210mm 真空吸盘样品台；夹具，直径 ≤210mm, 厚度 ≤15mm |
Motorized position stage
(X-Y axis)
电动定位样品台(X-Y轴) |
180mm × 150mm inspectable area; (180mm × 150mm可视区域;)
2?m repeatability, unidirectional; (单向2um重复性;)
3?m repeatability, bidirectional (双向3um重复性) |
Microscope optics
显微镜光学系统 |
5-megapixel digital camera;
180?m to 1465?m viewing area;
Digital zoom and motorized focus
五百万像素数字照相机;
180 ?m 至 1465 ?m 可视范围;
数字缩放及自动对焦功能 |
5-megapixel digital camera;
130?m to 1040?m viewing area;
Digital zoom and motorized focus
五百万像素数字照相机;
130 ?m 至 1040 ?m 可视范围;
数字缩放及自动对焦功能 |
Controller
控制器 |
NanoScope V / NanoScope v8.15 and later
NanoScope V型控制器 |
Workstation
工作站 |
Integrates all controllers and provides ergonomic design with immediate physical
and visual access
整合所有控制器、结合人体工学设计，提供直接的物理或可视接口 |
Vibration and Acoustic
isolation
振动隔绝 与 声音隔绝 |
Integrated, refer to installation requirements for additional information |
AFM modes
AFM模式 |
Standard:ScanAsyst, PeakForce Tapping,
TappingMode (air), Contact Mode, Lateral
Force Microscopy, PhaseImaging, Lift Mode, MFM,
Force Spectroscopy, Force Volume, EFM, Surface
Potential, Piezoresponse Microscopy, Force
Spectroscopy;
Optional:PeakForce QNM, HarmoniX,
Nanoindentation, Nanomanipulation, Nanolithograpy,
Force Modulation (air/fluid), TappingMode (fluid),
Torsional Resonance Mode, Dark Lift,
STM, SCM, C-AFM, SSRM, PeakForce TUNA,TUNA,
TR-TUNA, VITA |
Standard:ScanAsyst, Nanomechanical
Mapping, TappingMode (air), TappingMode
(fluid), PhaseImaging, Contact Mode,
Lateral Force Microscopy, Lift Mode,
MFM, EFM, Force Spectroscopy, Force
Volume
Optional:Nanoindentation,
Nanomanipulation, Nanolithograpy,
Surface Potential, Piezoresponse
Microscopy |
Certification
认证 |
CE |
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