浜у搧浼樺娍锛欬br/>1銆侀噰鐢?200鏉?mm楂樻€ц兘鍏夋爡銆傛柊鍨嬬殑鍏夋簮鎺у埗绯荤粺锛屼娇浠櫒鍏夋簮鍒囨崲鏇村揩閫熴€侟br/> 2銆佺簿纭殑2nm甯﹀锛屼娇娴嬭瘯鏁版嵁鏇村噯纭€備娇鐢ㄨ繘鍙i暱瀵垮懡鍏夋簮锛屼娇浠櫒鍏夋簮鍒囨崲鏇村揩閫熴€侟br/> 3銆佺壒鏈夌殑娉㈤暱鎺у埗绯荤粺锛屼娇娉㈤暱绮惧害鏇撮珮銆傛敼鑹殑鍏夊绯荤粺锛屼娇娴嬭瘯鏇村噯纭€侟br/> 4銆侀噰鐢ㄨ繘鍙g殑鍏夌偣杞崲鍣紝浣夸华鍣ㄧ殑鐏垫晱搴︽洿楂樸€侟br/> 5銆佹柊鍨嬬殑寰數鑴戞暟鎹鐞嗙郴缁熴€備娇浠櫒鐨勪娇鐢ㄦ洿绠€渚匡紝绋冲畾鎬т篃寰堝ソ銆侟br/> 6銆佸彲閫夐厤鍚勭被闄勪欢锛屼娇浠櫒鐨勬墿灞曟€ф洿濂姐€侟br/>鎶€鏈弬鏁帮細
鍨?nbsp; 鍙饵/span> |
756MC |
娉㈤暱椹卞姩 |
鑷姩 |
娉㈤暱鑼冨洿 |
190-1100nm |
娉㈤暱鍑嗙‘搴?/span> |
卤0.5nm |
娉㈤暱閲嶅鎬?/span> |
0.5nm |
鍏夎氨甯﹀ |
2nm |
閫忚壊姣斿噯纭害 |
卤0.5%T |
閫忚壊姣旈噸澶嶆€?/span> |
0.2%T |
閫忚壊姣旇寖鍥滁/span> |
0.0-125%T |
鍚稿厜搴﹁寖鍥滁/span> |
-0.031-2.5A |
娴撳害鏄剧ず鑼冨洿 |
0-1999 |
鏉傛暎鍏堻/span> |
0.5%T@220nm銆?40nm |
绋冲畾鎬?/span> |
卤0.002A/灏忔椂 |
闄勫姞鍔熻兘 |
鎵撳嵃 PC鎵弿杞欢 |
甯︾數鑴戝強鎵撳嵃鏈裹/span> |