鍔熻兘鍜岀壒鐐癸細

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鎶€鏈弬鏁帮細

鍏夊绯荤粺	姣斾緥鐩戞祴鍙屽厜鏉烖/span>
鍏夎氨甯﹀	1.8nm
娉㈤暱鑼冨洿	190锝?100nm
娉㈤暱鏈€澶у厑璁歌宸?/span>	卤0.3nm
娉㈤暱閲嶅鎬?/span>	鈮?.2nm
鍏夊害鑼冨洿	T:0锝?00.00%T A:-0.301锝?.0000Abs C:0锝?999
閫忓皠姣旀渶澶у厑璁歌宸?/span>	卤0.3%T
閫忓皠姣旈噸澶嶆€?/span>	鈮?.1%T
鏉傛暎鍏堻/span>	鈮?.05%T锛?20nm鍜?60nm澶勶級
绋冲畾鎬?鍣０	100%(T)绾垮櫔澹扳墹0.1%(T) 0%(T)绾垮櫔澹扳墹0.05%(T)
鍩虹嚎骞崇洿搴?/span>	卤0.002A
婕傜Щ	鈮?.001A/h(500nm澶?
鏄剧ず鍣?/span>	320脳240澶у睆骞昄CD(6鑻卞锛堻/span>
澶栧舰灏哄	540脳430脳220mm