| Dimension Edge Specifications |
| X-Y Scan Range |
90μm x 90μm typical, 85μm minimum |
| Z Range |
10μm typical in imaging and force ramp modes, 9.5μm minimum |
| Vertical Noise Floor |
<50pm RMS in appropriate environment, typical imaging bandwidth (up to 625Hz) |
XY Position Sensor Noise Level
(Closed Loop) |
<0.5nm RMS typical imaging bandwidth (up to 625Hz) |
Z Position Sensor Noise Level
(Closed Loop) |
<0.2nm RMS typical imaging bandwidth (up to 625Hz) |
| Sample/Size/Holder |
150mm vacuum chuck, 15mm thick; Up to 40mm thick with optional frame spacer |
Motorized Positioning Stage
(X-Y axis) |
150mm x 150mm inspectable area; Programmable for multi-site measurements |
| Microscope Optics |
5-megapixel digital camera;
180μm to 1465μm viewing area;
Digital zoom and motorized focus |
| Signal Access |
Configurable I/O signal access built into controller;
Includes customizable signal routing, digital feedback, and dual digital lock-in |
| Single Point Spectroscopy |
Three-axis closed loop control for point-and-shoot positioning and ramping;
Spring constant calibration with built-in thermal tune |
| Sample Temperature Control |
-35 to +250°C with optional heater/cooler accessory;
Includes gas purging capability |
| AFM Modes |
|
| Standard |
Contact Mode, Lateral Force Microscopy, TappingMode?, PhaseImaging?, LiftMode,
Magnetic Force Microscopy, Electric Force Microscopy, Dark Lift, Force Spectroscopy,
Nanoindentation, Nanolithography, Adhesion, ScanAsyst |
| Optional |
Scanning Tunneling Microscopy, Conductive AFM, Tunneling AFM, Scanning Capacitance
Microscopy, Surface Potential Microscopy, Piezoresponse Microscopy, Force Modulation
Microscopy, Liquid Imaging, Thermal Analysis, Electrochemical AFM |
| Probes |
Visit www.brukerAFMprobes.com to see our ocmprehensive listing of probes, including
Bruker-exclusive ScanAsyst probes |
| Facility Requirements |
|
| Vibration Isolation |
Vibration isolation table or integrated vibration/acoustic isolation enclosure required |
| Laser Classification |
Class 2M |
| Certification |
CE |
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